Microscope Projection Photolithography for Rapid Prototyping of Masters with Micron-Scale Features for Use in Soft Lithography
https://gmwgroup.harvard.edu/publications/microscope-projection-photolithography-rapid-prototyping-masters-micron-scale
https://gmwgroup.harvard.edu/files/gmwgroup/files/757.pdf
Low cost UV laser direct write photolithography system for rapid prototyping of microsystems
https://pdfs.semanticscholar.org/721d/d71875d7f231b97340e6b514361c4081bf28.pdf